XDD1 diaphragm pumps are used for backing small compound turbomolecular pumps in clean, high vacuum applications, and also designed to be free standing bench top units. A typical ultimate pressure of better than 5 x 10-8 mbar can be achieved when using an XDD1 to back a 70 ls-1 turbomolecular pump.

The 24 V version is designed to provide a complete pumping package using the Edwards

This version is suited to the customer who is building their own a system. The pump is a compact and efficient. Under normal conditions the XDD1 is virtually maintenance free, the lifetime of the diaphragms and valves is typically > 10,000 operating hours, depending on the application.


Click here to download the PDF file: XDD1 Dry Diaphragm Pumps

Edwards XDD1 diaphragm pump


Features and Benefits

  • Dry pumping, lubricant free technology eliminating the need for costly oil changes and disposal
  • Lightweight and compact with a small footprint allowing flexibility of use
  • Ideal backing pump for small turbomolecular pumps
  • Complies with EN61010, EN1012, CSA/UL standards
  • Worldwide 115/230 V or 24 V options
  • IEC 60320 C14 connector on a.c. pumps


  • Residual gas analysis
  • Mass spectrometers
  • Cryostat and dewar evacuation
  • Ion pump evacuation
  • Surface science


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